WebFeb 15, 2011 · Void and hillock formation during annealing was studied depending on the deposition conditions. Aluminum films were deposited onto oxidized silicon substrates by … WebFeb 10, 2011 · A strategy was developed for controlling hillock formation in thin metal films by controlling the fiber texture to be of a relatively “weak” orientation. Two-dimensional molecular dynamics (MD) simulations were performed to determine the parameter dependencies of texturing under ion beam assisted deposition. Simulations showed that …
Suppressing hillock formation in Si-supported pure Al films
WebJan 1, 2006 · Hillock formation was observed, but it can only partially account for the stress relaxation measured by the wafer curvature technique. The wafer curvature technique … A hillock or knoll is a small hill, usually separated from a larger group of hills such as a range. Hillocks are similar in their distribution and size to small mesas or buttes. This particular formation occurs often in Great Britain and China. A similar type of landform in the Scandinavian countries goes by the name ”kulle” or ”bakke” (depending on the country) and is contrary to the above phenomena formed when glaciers polish down hard, crystalline bedrock of gneiss or granites, leavi… fishing areas
Hillock Formation, Metal Lifting and Voiding of an AlCu …
WebMar 7, 2012 · Figure 1 Illustration of the experimentally observed regimes of hillock formation. (a) During thermal treatment of a dense flat film (b) hillocks form on the film surface with a regular hexagonal shape (c) due to further annealing holes and secondary hillocks form in the vicinity of the primary hillock. WebOct 30, 1992 · The effect of using bilayer Ni/Al-1%Cu or Co/Al-1%Cu metallization stacks with regard to hillock formation is investigated in this study and compared to hillock suppression capabilities of Al-1%Si … Expand. 10. Save. Alert. The initial stages of the formation of holes and hillocks in thin films under equal biaxial stress. F. Génin; Physics. fishing areas around uk